THERMAL SCIENCE

International Scientific Journal

Yanni Zhang

,

Yiman Han

,

Xin Zhao

,

Zhen Zhao

,

Jing Pang

APPLYING NUMERICAL CONTROL TO ANALYZE THE PULL-IN STABILITY OF MEMS SYSTEMS

ABSTRACT
The micro-electro-mechanical system is widely used for energy harvesting and thermal wind sensor, its efficiency and reliability depend upon the pull-in instability. This paper studies a micro-electro-mechanical system using He-Liu [34] formulation for finding its frequency-amplitude relationship. The system periodic motion, pull-in instability and pseudo-periodic motion are discussed. This paper offers a new window for security monitoring of the system reliable operation.
KEYWORDS
micro-electro-mechanical systems, pull-in instability, He's frequency formulation, dynamic characteristic
PAPER SUBMITTED: 2023-03-18
PAPER REVISED: 2023-08-01
PAPER ACCEPTED: 2023-08-06
PUBLISHED ONLINE: 2024-05-18
DOI REFERENCE: https://doi.org/10.2298/TSCI2403171Z
CITATION EXPORT: view in browser or download as text file
THERMAL SCIENCE YEAR 2024, VOLUME 28, ISSUE Issue 3, PAGES [2171 - 2178]
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Applying numerical control to analyze the pull-in stability of MEMS systems

© 2024 Society of Thermal Engineers of Serbia. Published by the Vinča Institute of Nuclear Sciences, National Institute of the Republic of Serbia, Belgrade, Serbia. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution-NonCommercial-NoDerivs 4.0 International licence