THERMAL SCIENCE

International Scientific Journal

EXPERIMENTAL INVESTIGATION OF THE EMBEDDED MICRO-CHANNEL MANIFOLD COOLING FOR POWER CHIPS

ABSTRACT
Power chips with high power dissipation and high heat flux have caused serious thermal management problems. Traditional indirect cooling technologies could not satisfy the increasing heat dissipation requirements. The embedded cooling directly inside the chip is the hot spot of the current research, which bears greater cooling potential comparatively, due to the shortened heat transfer path and decreased thermal resistance. In this study, the thermal behaviors of the power chips were demonstrated using a thermal test chip, which was etched with micro-channels on its substrate’s backside and bonded with a manifold which also fabricated with silicon wafer. The chip has normal thermal test function and embedded cooling function at the same time, and its size is 7 × 7 × 1.125 mm3. This paper mainly discussed the influence of width of micro-channels and the number of manifold channels on the thermal and hydraulic performance of the embedded cooling structure in the single-phase regime. Compared with the conventional straight micro-channel structure, the cooling coefficient of performance of the 8 × –50 (number of manifold distribution channels: 8, micro-channel width: 50 μm) structure is 3.38 times higher. It is verified that the 8 × –50 structure is capable of removing power dissipation of 300 W (heat flux: 1200 W/cm2) at a maximum junction temperature of 69.6℃ with pressure drop of less than 90.8 kPa. This study is beneficial to promote the embedded cooling research, which could enable the further release of the power chips performance limited by the dissipated heat.
KEYWORDS
PAPER SUBMITTED: 2021-09-08
PAPER REVISED: 2021-10-01
PAPER ACCEPTED: 2021-10-12
PUBLISHED ONLINE: 2021-11-06
DOI REFERENCE: https://doi.org/10.2298/TSCI210908328Z
CITATION EXPORT: view in browser or download as text file
THERMAL SCIENCE YEAR 2022, VOLUME 26, ISSUE Issue 2, PAGES [1531 - 1543]
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© 2022 Society of Thermal Engineers of Serbia. Published by the Vinča Institute of Nuclear Sciences, National Institute of the Republic of Serbia, Belgrade, Serbia. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution-NonCommercial-NoDerivs 4.0 International licence