ABSTRACT
In this study, the design and analysis of the micro beam is carried out using COMSOL multiphysics. The current passing through the beam distributes the heat energy due to its resistance that pushes the entire micro beam to the desired distance through thermal expansion. This expansion varies depending on the amount of current passing through the beam and the emitted temperature. The purpose of the model created is to estimate the amount of current and temperature increase required to cause displacement in the proposed micro beam using analysis software. In addition, displacements and temperature data produced in micro beams for different metallic materials (Al, Cu, Ni, and Pt) and different input potentials (0.3 V, 0.6 V, and 0.9 V) are reported. These materials are used as functional materials in the field of micro-electro-mechanical-system because of their important physical and electrical properties. As a result of the simulation studies, increasing the voltage increased the displacement in the materials and the resulting temperature. While there is a serious difference between the displacement data of the materials, the temperatures are close to each other. When 0.9 V voltage is applied, the highest displacement values for Al, Cu, Ni, and Pt are; 7.88 μm, 5.36 μm, 3.62 μm, and 2.72 μm, respectively. As a result, it has been observed that aluminum used in micro beam design gives a significant amount of dis¬placement for the proposed geometry when compared to other metallic beams.
KEYWORDS
PAPER SUBMITTED: 2020-05-29
PAPER REVISED: 2020-11-07
PAPER ACCEPTED: 2020-11-15
PUBLISHED ONLINE: 2021-01-24
- Crescenzi, R., et al., Operational characterization of CSFH MEMS technology based hinges, Journal of Micromechanics and Microengineering, 28 (2018), pp. 14-21.
- Lifton, A., et al., Options for additive rapid prototyping methods (3D printing) in MEMS technology, Rapid Prototyping Journal, 20 (2014), pp. 403-412.
- Morris, A., et al., Monolithic integration of RF-MEMS within CMOS. In 2015 International Symposium on VLSI Technology, Systems and Applications, 2015.
- Fischer, A. C., et al., Forsberg F., Lapisa M. ve diğerleri. Integrating MEMS and ICs, Microsystems & Nanoengineering, 1, 15005, 2015.
- Ertugrul, I., et al., Fabrication of MEMS based electrothermal microactuators with additive manufacturing Technologies, Materiali in tehnologije, 53 (2019), pp. 665-670.
- Tilli, M., et al., Handbook of silicon based MEMS materials and Technologies, 2015.
- Olszewski, O. Z., et al., A MEMS silicon-based piezoelectric AC current sensor, Procedia Engineering, 8 (2014), pp. 1457-1460.
- Philippe, J., et al., Technology development and analysis of a multiphysic system based on NEMS co-integrated with CMOS for mass detection application (Doctoral dissertation), 2014.
- Pirouznia, P., et al., Analytical optimization of high performance and high quality factor MEMS spiral inductor, Progress In Electromagnetics Research, 34 (2014), pp. 171-179.
- Hikmat, O.F., et al., RF MEMS inductors and their applications—A review, Journal of Microelectromechanical Systems, 26 (2016), pp. 17-44.
- Marek, J., et al., MEMS for automotive and consumer electronics, IEEE International Solid-State Circuits Conference-(ISSCC), 10 (2010), pp. 9-17.
- Satyanarayana, T., et al., Design and simulation of Micro Resistor beam using COMSOL, IJASETR, 2(2014), pp. 1-7.
- Stabile, A., et al., Design and verification of a negative resistance electromagnetic shunt damper for spacecraft micro-vibration, Journal of Sound and Vibration, 386 (2017), pp. 38-49.
- Singh, K., et al., Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor, Sensors and Actuators A: Physical, 223 (2015), pp. 151-158.
- Bernstein, J. J., et al., A MEMS diamond hemispherical resonator, Journal of Micromechanics and Microengineering, 23(2013), 125007.
- Arora, S., et al., Design of MEMS based microcantilever using comsol multiphysics, International Journal of Applied Engineering Research, 7 (2012), pp. 1-3
- Reddy, V.M., et al., Design and analysis of microcantilevers with various shapes using comsol multiphysics software, International Journal of Emerging Technology and Advanced Engineering, 3 (2013), pp. 12-25.