THERMAL SCIENCE
International Scientific Journal
THERMAL MANAGEMENT OF THE HOTSPOTS IN 3-D INTEGRATED CIRCUITS
ABSTRACT
Vertical integration for microelectronics possesses significant challenges due to its fast dissipation of heat generated in multiple device planes. This paper focuses on thermal management of a 3-D integrated circuit, and micro-channel cooling is adopted to deal with the 3-D integrated circuitthermal problems. In addition, thermal through-silicon vias are also used to improve the capacity of heat trans-mission. It is found that combination of microchannel cooling and thermal through-silicon vias can remarkably alleviate the hotspots. The results presented in this paper are expected to aid in the development of thermal design guidelines for 3-D integrated circuits.
KEYWORDS
PAPER SUBMITTED: 2017-02-20
PAPER REVISED: 2017-10-11
PAPER ACCEPTED: 2017-12-11
PUBLISHED ONLINE: 2018-09-09
THERMAL SCIENCE YEAR
2018, VOLUME
22, ISSUE
Issue 4, PAGES [1685 - 1690]
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