TY - JOUR
TI - Investigation of LiCoO2 thin film battery properties with changing Ar/O2 gas atmosphere
AU - Alkan Engin
AU - Singil Mustafa Mahmut
AU - Gungor Hatice
AU - Guler Aslihan
AU - Kuruahmet Deniz
AU - Guler Oguz Mehmet
AU - Akbulut Hatem
JN - Thermal Science
PY - 2023
VL - 27
IS - 4
SP - 3071
EP - 3080
PT - Article
AB - Thin film batteries are considered the most promising next-generation  batteries due to their superior safety and highly developed energy density.  The deposition of LiCoO2 thin films with 200 nm thickness was carried out by  radio frequency magnetron sputtering. The LiCoO2 thin films were deposited  in Ar/O2 gas mixture and coated samples which were deposited in 3% and 10%  oxygen amounts, labeled as LCO-3 and LCO-10, respectively. Deposited LCO-3  and LCO-10 thin films possess phase purity and high crystallinity and have a  uniform nanostructure with an average grain size of 30-60 nm with  homogeneous dispersion. The cyclic voltammetry curves of LCO-3 and LCO-10  electrodes upon electrochemical cycling revealed phase transformations of  both materials. The ionic conductivity of the LCO-10 thin films have been  exhibited more convenient results than LCO-3 samples. The electrode  manifests superior specific capacity of 48 μAh/cm2 in the initial cycle.  This study provides an information on how LiCoO2 crystal structure and  electrochemical properties are affected by changing deposition parameters  such at the Ar/O2 gas mixture.