TY - JOUR TI - Theoretical calculation and simulation of surface-modified scalable silicon heat sink for electronics cooling AU - Zhang Yichi AU - Saito Shinichi AU - Tsuchiya Yoshishige AU - Wang Yeliang JN - Thermal Science PY - 2021 VL - 25 IS - 6 SP - 4181 EP - 4187 PT - Article AB - A surface-modified scalable heat sink that can be fabricated by applying silicon microfabrication technology has been proposed in this paper. Theoretical estimation of the heat sink thermal resistance is based on the heat sink with overall size of 1 cm × 1 cm × 1 cm, and four kinds of structure with various total number of grooves on the surface of fins have been investigated. Finite element analysis has been conducted by using COMSOL Multiphysics where fluid dynamics and heat transfer are taken into account. As a result, the lowest heat sinks thermal resistance of 6.84°C per Watt is achieved for the structure with a larger fin area (13.1 cm2) and a higher inlet air flow rate (4 m/s), suggesting an optimum fin area depending on the air flow rate.