TY - JOUR
TI - MEASUREMENT OF TRANSPORT PROPERTIES OF THIN FILMS AND COATINGS
AU - Stanimirović Andrej M
AU - Maglić Kosta D
JN - Thermal Science
PY - 1997
VL - 1
IS - 2
SP - 91
EP - 106
PT - Article
AB - Free-standing and substrate-mounted thin films have been widely used for microelectronic and optical devices. In particular, CVD diamond, as a new material with ideal combination of properties (electrical isolator, 
excellent heat conductor, hardest known material) becomes important both in heat spreading and surface strengthening applications. Thermal barrier coatings are quickly gaining widest application in
heat management applications. In devices and systems design, demand for accurate thermophysical property functions of these materials, especially their thermal conductivity and thermal diffusivity, has been increasing. A variety 
of methods have been applied, modified and developed to measure transport properties of thin films and CVD diamond. Paper reviews methods of measuring thermal conductivity and thermal diffusivity of thin films and
CVD diamond and discusses their advantages and disadvantages. Measurements of thermal diffusivity of tantalum, tungsten and nickel thin films at our laboratory applying 4C calorimetric technique are reported.